Differenciális mikrokaloriméter hőmérséklettartományának kiterjesztése alacsony hőmérsékletű felhasználásokhoz
Extending the temperature range of differential microcalorimeters for low temperature applications
Keywords:
microcalorimetry, mems membrane structure, microheaters, signal processing, temperature feedback and control, /, mikrokalorimetria, mems membrán struktúra, mikrofűtőtest, jelfeldolgozás, hőmérséklet visszacsatolás és szabályozásAbstract
At the Institute of Physics of the University of Debrecen, a microcalorimeter for the measurement of small amounts of samples has been developed [1,2,3]. The calorimeter is suitable for the calorimetric measurement of thin film samples evaporated on a heated MEMS sample holder surface, after proper calibration, and for the determination of specific heat in the temperature range between 80℃ - 300℃. In the present work, we demonstrate how calorimetric measurements can be extended to the lower temperature range of 0℃, thus enabling the measurement of reactions not previously investigated.
Kivonat
A Debreceni Egyetem Fizikai Intézetében kifejlesztésre került egy anyagmennyiségűkis tömegű minták mérésére alkalmas mikrokaloriméter [1,2,3]. A kaloriméter megfelelő kalibrálás után alkalmas a fűthető MEMS mintatartó felületére párologtatott vékonyréteg minták kalorimetrikus mérésére, fajhő meghatározására a 80℃ - 300℃ közötti hőmérséklettartományban. A jelen munkában bemutatjuk, hogy hogyan lehet a kalorimetrikus méréseket kiterjeszteni a 0℃-os alsó hőmérsékletig, így lehetővé téve eddig nem vizsgált reakciók mérését is.
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